Defect Characterization using Transmission Scanning Electron Microscopy

Scanning Transmission Electron Microscopy for Nanostructure Characterization

15. Scanning Transmission Electron Microscopy

Scanning transmission low-energy electron microscopy

We discuss an extension to the transmission mode of the cathode-lens-equipped scanning electron microscope, enabling operation down to the lowest energies of electrons. Penetration of electrons through free-standing ultrathin films is examined along the full energy scale, and the contribution of the secondary electrons (SEs), released near the bottom surface of the sample, is shown, enhancing t...

Z-contrast Scanning Transmission Electron Microscopy

Elemental mapping in scanning transmission electron microscopy

We discuss atomic resolution chemical mapping in scanning transmission electron microscopy (STEM) based on core-loss electron energy loss spectroscopy (EELS) and also on energy dispersive X-ray (EDX) imaging. Chemical mapping using EELS can yield counterintuitive results which, however, can be understood using first principles calculations. Experimental chemical maps based on EDX bear out the t...